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PhD Preliminary Oral Exam – Melanie Jenkins

Investigation of energy barrier heights within metal-insulator-metal devices via internal photoemission spectroscopy

Metal-insulator-metal (MIM) and dual-insulator MIM (MIIM) devices are used in rectennas, hot-electron transistors, single electron transistors, resistive random access memory, and capacitors. The performance of these devices rely heavily on the energy barrier height at each metal-insulator interface. Thus, determination of the in-situ electron energy barrier at each interface is critical to accurately predicting charge transport and confidently integrating new materials into microelectronic devices. Internal photoemission (IPE) spectroscopy is a well-established electro-optical technique that allows for direct measurement of interfacial energy barriers within a device structure. Although IPE has widely been used to characterize the interfaces between various polycrystalline elemental metals and oxides within MOS structures, there have been relatively few reports of IPE within MIM structures. Amorphous metals are critical in the aforementioned devices, owing to their ultra-low roughness which gives rise to a highly uniform electric field in the ultrathin sandwiched insulator(s). In this work, IPE is used to measure the energy barrier heights in MIM device structures between the Ta-based amorphous metals (TaNiSi and TaWSi) and polycrystalline TaN using insulators deposited via atomic layer deposition (ALD). A comparison is also made between Al and Au top electrodes for devices with a TaWSi bottom electrode. Further, proposals for additional interfaces of interest are made, including newly developed ALD metals and solution-deposited insulators.

Major Advisor: John Conley
Committee: Larry Cheng
Committee: Alan Wang
Committee: Greg Herman
GCR: Megumi Kawasaki

Thursday, November 15, 2018 at 10:00am to 12:00pm


Kelley Engineering Center, 1007
110 SW Park Terrace, Corvallis, OR 97331

Event Type

Lecture or Presentation

Event Topic

Research

Organization
College of Engineering, Electrical Engineering and Computer Science
Contact Name

Calvin Hughes

Contact Email

Calvin.Hughes@oregonstate.edu

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